The primary use of graphite in epitaxial disk grills is as a heat transfer material and support structure material. The following are the main applications of graphite in epitaxial tray grills:
Thermally conductive material: Graphite has excellent thermal conductivity and can quickly and uniformly transfer heat to the epitaxial disk. In the semiconductor epitaxy process, the graphite grill can effectively conduct heat to the epitaxy disk to reach the required temperature and achieve uniform heat distribution, thereby promoting wafer growth and quality control.
Support structure material: Graphite grill is part of the support structure, which can provide a stable support platform, so that the epitaxial disk can be firmly fixed on the grill. Graphite material has high strength and high temperature resistance, which can withstand the weight load and high temperature environment during the epitaxy process, ensuring the stability and safety of the epitaxy disk.
In summary, the main uses of graphite in epitaxial plate grills include as a thermally conductive material and as a support structure material. As a thermally conductive material, graphite can quickly and uniformly transfer heat to the epitaxial disk to achieve uniform heat distribution, thereby promoting wafer growth and quality control. As a support structure material, the graphite grill can provide a stable support platform to ensure that the epitaxial disk can be firmly fixed on the grill and withstand the weight load and high temperature environment during the epitaxy process. The application of graphite grill helps to achieve efficient heat conduction and stable support structure, thus ensuring the success of the epitaxy process.