The main use of graphite in epitaxial rings is as support material and protective layer. The following are the main applications of graphite in epitaxial rings:
Support material: Graphite epitaxy rings are commonly used to support epitaxy disks and wafers. It provides a solid platform and ensures that the wafer can be held firmly on the ring. Graphite epitaxy rings have high strength and high temperature resistance, which can withstand the weight load and high temperature environment during the epitaxy process.
Protective layer: The graphite epitaxy ring can be used as a protective layer to prevent contamination and damage during the epitaxy process. Graphite material has excellent corrosion resistance and chemical stability, and can resist the attack of corrosive gases and chemicals, ensuring the purity and quality of the epitaxy process.
In summary, the main use of graphite in epitaxial rings is as a support material and protective layer. As a support material, the graphite epitaxy ring provides a stable support platform to ensure that the wafer can be fixed on the ring. As a protective layer, the graphite epitaxy ring prevents contamination and damage, protecting the purity and quality of the epitaxy process. The application of the graphite epitaxy ring helps to achieve stable support and protection to ensure the success of the epitaxy process.