The main use of graphite in ion implantation is as a carrier or protective material for implanted materials. The following are the main applications of graphite in ion implantation:
Carrier Material: Graphite is often used as a carrier material for ions during implantation. In the ion implantation process, a beam of ions is accelerated and injected into the surface of a target material to change its physical or chemical properties. Graphite as a carrier material has the following characteristics: its open structure can accommodate the implantation of ions, and it can effectively absorb the implanted energy and heat, thereby reducing the damage to the target material.
Protective material: Graphite is also used as a protective material in ion implantation to protect specific areas from ion implantation. During some implants, only specific areas need to be exposed to the ion beam, while other areas need to retain their original structure or properties. In this case, graphite can be placed or coated over the area to be protected, acting as a shield or blocking the ion beam to ensure that the targeted area is not affected by the implant.
In summary, the main uses of graphite in ion implantation include as a carrier or protective material for implanted materials. As a carrier material, graphite can accommodate the implantation of ions and absorb the energy and heat of implantation, reducing damage to the target material. As a protective material, graphite can be used to shield or block ion beams, protecting specific areas from implantation. These applications help to control and direct the ion implantation process to achieve desired material modification or fabrication effects.